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Yunmi Lee
at Yonsei Univ
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Publications (1)
Proceedings Article | 15 March 2007 Paper
Design of metal slits for higher harmonic fringe patterns generated with surface plasmon interference lithography
Proceedings Volume 6517, 651722 (2007) https://doi.org/10.1117/12.712522
KEYWORDS: Aluminum, Surface plasmons, Polymethylmethacrylate, Metals, Lithography, Photomasks, Fringe analysis, Photoresist materials, Light wave propagation, Finite-difference time-domain method
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