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Yusuke Tsukada
at Mitsubishi Chemical Corp
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Publications (1)
Proceedings Article | 16 February 2020 Paper
Recent progress of large size and low dislocation bulk GaN growth
Yutaka Mikawa, Takayuki Ishinabe, Yuji Kagamitani, Tae Mochizuki, Hirotaka Ikeda, Kenji Iso, Tatsuya Takahashi, Kohei Kubota, Yuuki Enatsu, Yusuke Tsukada, Satoru Izumisawa
Proceedings Volume 11280, 1128002 (2020) https://doi.org/10.1117/12.2540737
KEYWORDS: Gallium nitride, Crystals, Etching, Transmission electron microscopy, Semiconducting wafers, Polishing, X-rays, Electronic components
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