0
Articles

Active alignment of replicated microlens arrays on a charge-coupled device imager

[+] Author Affiliations
Hanspeter Povel, Achim Gandorfer, Peter Steiner, Pietro N. Bernasconi

ETH Zentrum, Institute of Astronomy, CH-8092 Zu¨rich, Switzerland

Michael T. Gale, Jo¨rn Pedersen, Helmut Schu¨tz

Paul Scherrer Institute, Badenerstrasse 569, CH-8048 Zu¨rich, Switzerland

Opt. Eng. 36(5), 1510-1517 (May 01, 1997). doi:10.1117/1.601352
History: Received Oct. 1, 1996; Accepted Dec. 20, 1996
Text Size: A A A

Abstract

A hybrid microlens/aperture mask assembly is fabricated, aligned and mounted on a CCD imager for an application in an imaging polarimeter. The microlens array is produced by direct laser writing in photoresist followed by electroforming and replication onto a glass substrate in registration with a slit aperture array on the reverse side. An alignment of the combined arrays to the CCD imager of better than 0.7 μm in lateral position and 0.005 deg rotation is achieved. Stray light of less than 1% was measured for the hybrid module. The optical microsystem satisfied the challenging requirements of the imaging polarimeter and the technique has applications in other areas of optical sensing, metrology and processing. © 1997 Society of Photo-Optical Instrumentation Engineers.

© 1997 Society of Photo-Optical Instrumentation Engineers

Citation

Hanspeter Povel ; Michael T. Gale ; Jo¨rn Pedersen ; Achim Gandorfer ; Peter Steiner, et al.
"Active alignment of replicated microlens arrays on a charge-coupled device imager", Opt. Eng. 36(5), 1510-1517 (May 01, 1997). ; http://dx.doi.org/10.1117/1.601352


Access This Article
Sign In to Access Full Content
Please Wait... Processing your request... Please Wait.
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
 
Your Session has timed out. Please sign back in to continue.
Sign In to Access Full Content

Figures

Tables

References

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement

Buy this article ($18 for members, $25 for non-members).
Sign In