Phase-shifting interferometry: minimization of systematic errors

Parameswaran Hariharan

doi:10.1117/1.602443

1 April 2000 Phase-shifting interferometry: minimization of systematic errors

Parameswaran Hariharan

Optical Engineering, Vol. 39, Issue 4, (April 2000). https://doi.org/10.1117/1.602443

Phase-shifting interferometry is now used widely to map the deviations of optical surfaces from a reference plane or reference sphere. However, the accuracy of such measurements is limited by systematic errors due to several causes. These systematic errors can be minimized by a simple averaging technique.

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Parameswaran Hariharan "Phase-shifting interferometry: minimization of systematic errors," Optical Engineering 39(4), (1 April 2000). https://doi.org/10.1117/1.602443

Published: 1 April 2000

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