Interferometry

Phase-shifting interferometry: minimization of systematic errors

[+] Author Affiliations
Parameswaran Hariharan

University of Sydney, Physical Optics Department, School of Physics, Sydney, NSW?2006, Australia

Opt. Eng. 39(4), 967-969 (Apr 01, 2000). doi:10.1117/1.602443
History: Received June 28, 1999; Accepted Aug. 16, 1999
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Abstract

Phase-shifting interferometry is now used widely to map the deviations of optical surfaces from a reference plane or reference sphere. However, the accuracy of such measurements is limited by systematic errors due to several causes. These systematic errors can be minimized by a simple averaging technique. © 2000 Society of Photo-Optical Instrumentation Engineers.

© 2000 Society of Photo-Optical Instrumentation Engineers

Citation

Parameswaran Hariharan
"Phase-shifting interferometry: minimization of systematic errors", Opt. Eng. 39(4), 967-969 (Apr 01, 2000). ; http://dx.doi.org/10.1117/1.602443


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