Instrumentation, Measurement, and Metrology

Accuracy of frequency-sweeping interferometry for absolute distance metrology

[+] Author Affiliations
Alexandre Cabral

National Institute of Engineering, Technology and Innovation (INETI), Aerospace Laboratory (LAER), 1649-038 Lisbon, Portugal

José Rebordão

National Institute of Engineering, Technology and Innovation (INETI), Aerospace Laboratory (LAER), 1649-038 Lisbon, Portugal

Opt. Eng. 46(7), 073602 (July 26, 2007). doi:10.1117/1.2754308
History: Received September 27, 2006; Accepted January 15, 2007; Published July 26, 2007
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Coherent interferometric absolute distance metrology is one of the most interesting techniques for length metrology. Without movement, measurements are made without ambiguity, by using either one or several synthetic wavelengths resulting from the beating of two or more wavelengths (multiple-wavelength interferometry), or a frequency sweep (frequency-sweeping interferometry). Sensors based on the latter are relatively simple devices and can fulfill an important role in dimensional metrology. In addition, their parameterization flexibility allows trade-offs to be performed, either technology-driven or application-related. We present in detail a theoretical model of frequency-sweeping interferometry and its uncertainty budget, discuss different parameterizations, present a method for drift error compensation, and demonstrate and evaluate sensor performance and robustness with a prototype sensor composed of a mode-hop-free frequency-sweep external-cavity diode laser, a high-finesse Fabry-Pérot interferometer (to measure accurately the frequency sweep range), homodyne detection, and data processing. Results have shown that the inaccuracy will not exceed 10μm for distances up to 1m, at an affordable degree of complexity.

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© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Alexandre Cabral and José Rebordão
"Accuracy of frequency-sweeping interferometry for absolute distance metrology", Opt. Eng. 46(7), 073602 (July 26, 2007). ; http://dx.doi.org/10.1117/1.2754308


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