PROFILOMETRY

Profilometer for measuring superfine surfaces

[+] Author Affiliations
Zhao-Fei Zhou, Tao Zhang, Weidong Zhou, Wenjie Li

Sichuan University, Institute of Applied Lasers, First Ring Av. S1 Section 24#, Chengdu, Sichuan, 610065, China E-mail: zhfzhou@scu.edu.cn

Opt. Eng. 40(8), 1646-1652 (Aug 01, 2001). doi:10.1117/1.1387994
History: Received Jan. 3, 2000; Revised May 1, 2000; Accepted July 21, 2000
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An interference profilometer for measuring the microprofile of superfine surfaces is described. It has a stabilized He-Ne laser light source with two longitudinal modes and two coaxial interference arms. The measuring arm is focused on the sample surface to form a small spot while the reference arm forms a large spot. As a result, the reference arm provides a constant signal and only the measuring arm will be sensitive to the irregularity of the microprofile. Mechanical vibration has a very small effect on the instrument performance. Even if vibration amplitudes reach 300 nm, the measurement noise is less than 1 nm. The instrument has a vertical resolution better than 0.2 Å root mean square (rms) and smallest form error among existing coaxial profilometers. It is well suited for measuring the microstructure on photoetched surfaces. © 2001 Society of Photo-Optical Instrumentation Engineers.

© 2001 Society of Photo-Optical Instrumentation Engineers

Topics

Profilometers

Citation

Zhao-Fei Zhou ; Tao Zhang ; Weidong Zhou and Wenjie Li
"Profilometer for measuring superfine surfaces", Opt. Eng. 40(8), 1646-1652 (Aug 01, 2001). ; http://dx.doi.org/10.1117/1.1387994


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