Improved sol-gel thin film for fabrication of multilevel structures using a high-energy beam-sensitive gray-scale mask

XiaoCong Yuan; W. X. Yu; Nam Quoc Ngo; Wai Chye Cheong

doi:10.1117/1.1535202

1 February 2003 Improved sol-gel thin film for fabrication of multilevel structures using an HEBS gray scale mask

XiaoCong Yuan, W. X. Yu, Nam Quoc Ngo, Wai Chye Cheong

Optical Engineering, Vol. 42, Issue 2, (February 2003). https://doi.org/10.1117/1.1535202

A new photosensitive negative-tone inorganic-organic hybrid SiO₂/TiO₂ glass with improved linear UV response property is investigated for fabrication of multilevel structures. The UV response of the sol-gel material is studied as a function of optical densities (ODs) of a high-energy beam-sensitive (HEBS) gray-scale mask. It is shown that the sol-gel material exhibits a good linear response to the OD values, which is ultimately used to define the surface profile height for a specific design. The linearity is especially useful for fabrication of diffractive optical elements with linear phase distributions. As an example, we apply the sol-gel process and the gray-scale mask to the fabrication of a blazed grating.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

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XiaoCong Yuan, W. X. Yu, Nam Quoc Ngo, and Wai Chye Cheong "Improved sol-gel thin film for fabrication of multilevel structures using an HEBS gray scale mask," Optical Engineering 42(2), (1 February 2003). https://doi.org/10.1117/1.1535202

Published: 1 February 2003

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