Instrumentation, Techniques, and Measurement

Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry

[+] Author Affiliations
Risto Montonen, Ivan Kassamakov, Kenneth Österberg

University of Helsinki, Helsinki Institute of Physics, Gustaf Hällströmin katu 2, P.O. Box 64, FI-00014 Helsinki, Finland

University of Helsinki, Department of Physics, Gustaf Hällströmin katu 2, P.O. Box 64, FI-00014 Helsinki, Finland

Edward Hæggström

University of Helsinki, Department of Physics, Gustaf Hällströmin katu 2, P.O. Box 64, FI-00014 Helsinki, Finland

Opt. Eng. 55(1), 014103 (Jan 19, 2016). doi:10.1117/1.OE.55.1.014103
History: Received October 14, 2015; Accepted December 11, 2015
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Abstract.  The internal shape and alignment of accelerator discs is crucial for efficient collider operation at the future compact linear collider (CLIC). We applied a calibrated custom-made Fourier-domain short coherence interferometer to measure the height of 40 and 60  μm ultraprecisely turned steps (surface roughness Ra25  nm, flatness 2  μm) on an oxygen-free electronic copper disc. The step heights were quantified to be (39.6±2.6)  μm and (59.0±2.3)  μm. The uncertainties are quoted at 95% confidence level and include contributions from calibration, refractive index of air, cosine error, surface roughness, and thermal expansion in comparison to standard temperature of 20°C. The results were verified by measuring the same steps using a commercial white light interferometer Veeco—NT3300. Our instrument can ensure that the accelerator discs of the CLIC are aligned within the tolerance required for efficient collider operation.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Risto Montonen ; Ivan Kassamakov ; Edward Hæggström and Kenneth Österberg
"Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry", Opt. Eng. 55(1), 014103 (Jan 19, 2016). ; http://dx.doi.org/10.1117/1.OE.55.1.014103


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