Phase retrieval algorithm for line-scan dispersive interferometry

Dawei Tang; Prashant Kumar; Feng Gao; Xiangqian Jiang

doi:10.1117/12.2500918

24 July 2018 Phase retrieval algorithm for line-scan dispersive interferometry

Dawei Tang, Prashant Kumar, Feng Gao, Xiangqian Jiang

Proceedings Volume 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018); 108270F (2018) https://doi.org/10.1117/12.2500918
Event: Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 2018, Shanghai, China

Abstract

The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range.

Citation Download Citation

Dawei Tang, Prashant Kumar, Feng Gao, and Xiangqian Jiang "Phase retrieval algorithm for line-scan dispersive interferometry", Proc. SPIE 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 108270F (24 July 2018); https://doi.org/10.1117/12.2500918

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