Effect of precession mode on the surface error of optical components in bonnet polishing

Bo Zhong; Xian-hua Chen; Jie Li; Zhong-jiang Wen

doi:10.1117/12.2503980

12 December 2018 Effect of precession mode on the surface error of optical components in bonnet polishing

Bo Zhong, Xian-hua Chen, Jie Li, Zhong-jiang Wen

Proceedings Volume 10847, Optical Precision Manufacturing, Testing, and Applications; 1084707 (2018) https://doi.org/10.1117/12.2503980
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China

Abstract

Bonnet polishing has the advantage of high removal efficiency and is widely used in aspheric manufacturing process. However, it is difficult to avoid the mid-spatial-frequency (MSF) error in the process of high efficiency bonnet polishing. Consequently, the paper established the precession simulation model of bonnet polishing, aiming to reveal the effect of precession mode on the surface error, and obtain the optimal precession mode to restrain the MSF error. The three precession modes, i.e., single-step precession, multi-step precession and continuous precession, were compared in simulation analysis and verified through the practical polishing experiments. The experimental results exhibited a good agreement with the theoretical results, which verified the correctness of the proposed model. The results shown that the optimal multi-step precession mode can not only restrain the MSF error, but also obtain better surface roughness. The paper demonstrated the validity of the multi-step precession polishing, which laid the foundation for the high-efficiency and high-precision manufacturing of large-aperture optical components.

Citation Download Citation

Bo Zhong, Xian-hua Chen, Jie Li, and Zhong-jiang Wen "Effect of precession mode on the surface error of optical components in bonnet polishing", Proc. SPIE 10847, Optical Precision Manufacturing, Testing, and Applications, 1084707 (12 December 2018); https://doi.org/10.1117/12.2503980

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