FTIR spectroscopy of CVD and natural diamond

A. J. Gatesman

doi:10.1117/12.2301485

1 December 1990 FTIR spectroscopy of CVD and natural diamond

A. J. Gatesman

Proceedings Volume 1514, 15th International Conference on Infrared and Millimeter Waves; 151423 (1990) https://doi.org/10.1117/12.2301485
Event: 15th International Conference on Infrared and Millimeter Waves, 1990, Orlando, FL, United States

Abstract

Fourier transform spectroscopic transmissivity data in the far-infrared (10 - 350 cm^-1) were used to derive a model for the complex refractive index (n - ik) of polycrystalline diamond films grown by microwave plasma enhanced chemical vapor deposition. Due to their polycrystalline nature, the diamond films exhibited a surface roughness with crystallite sizes ranging from 0.1 - 8 μm. Scattering of the far-infrared radiation introduced by the diamond's rough surface is shown to have a significant effect on the FTIR spectrum and is accounted for in the determination of the material's optical properties. Free carrier type absorption (k proportional to λ²) is observed at longer wavelengths (l/λ < 100 cm^-1).

Citation Download Citation

A. J. Gatesman "FTIR spectroscopy of CVD and natural diamond", Proc. SPIE 1514, 15th International Conference on Infrared and Millimeter Waves, 151423 (1 December 1990); https://doi.org/10.1117/12.2301485

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KEYWORDS

Diamond

Data modeling

FT-IR spectroscopy

Refractive index

Absorption

Spectroscopy

Chemical vapor deposition

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