Ellipsometric study of CVD diamond films prepared with various grain sizes

Yanyan Lou; Linjun Wang; Hongliang Ma; Hongmei Deng; Bo Lu; Yiben Xia

doi:10.1117/12.792395

11 March 2008 Ellipsometric study of CVD diamond films prepared with various grain sizes

Yanyan Lou, Linjun Wang, Hongliang Ma, Hongmei Deng, Bo Lu, Yiben Xia

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 698419 (2008) https://doi.org/10.1117/12.792395
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Diamond films with various grain sizes are grown on silicon substrates by hot-filament chemical vapor deposition method. Scanning electron microscopy (SEM) measurement shows that the films consist of diamond grain with an average crystallite size of 1.4-0.1μm. The optical and structural properties of diamond films are investigated by spectroscopic phase modulated ellipsometer in the energy range of 0.8-1.5eV. A three-layer model, Si/diamond film/diamond film + void/, is applied to diamond film based on Bruggeman effective-medium approximation and New Amorphous dispersion formula which is a rewrite of Forouhi-Bloomer formulation. By fitting spectroscopic characteristics (Ψ,Δ) with Levenberg-Marquardt regression algorithm, the energy band gap and refractive index are obtained, along with the film thickness, bulk void fraction and roughness layer. The study indicates that both energy band gap and refractive index decrease when grain size reduces due to the raise of disorder sp² bonded carbon. The result on the Raman scattering measurement is consistent with the fitting result of spectroscopic ellipsometer.

Citation Download Citation

Yanyan Lou, Linjun Wang, Hongliang Ma, Hongmei Deng, Bo Lu, and Yiben Xia "Ellipsometric study of CVD diamond films prepared with various grain sizes", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698419 (11 March 2008); https://doi.org/10.1117/12.792395

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