Talbot projected 3D profilometry by means of one-step phase-shift     algorithms

Ruowei Gu; Toru Yoshizawa

doi:10.1117/12.132157

20 October 1992 Talbot projected 3D profilometry by means of one-step phase-shift algorithms

Ruowei Gu, Toru Yoshizawa

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132157
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A 3-D profiling system has been set up utilizing grating's self-imaging effects and one step phase-shift algorithms. In the system, the self-image of a linear grating is projected on a tested diffuse surface without any imaging lens, and then a phase deformed grating is generated on the surface corresponding to its shape. Arranging the deformed pattern to be imaged by a CCD camera at the magnification of 4 pixels per fringe period, the phases produced by surface shape can be extracted by arc tangent calculations with only one frame of fringe picture. An advanced phase ordered unwrapping algorithm, which can minimize the propagation of errors, is adopted for phase connections of 2(pi) jumps. We got the rms accuracy of 2(pi) /35 from 256 X 256 point phase measurements under 0.5 mW He-Ne laser illumination.

Citation Download Citation

Ruowei Gu and Toru Yoshizawa "Talbot projected 3D profilometry by means of one-step phase-shift algorithms", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132157

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