Processing of white-light correlograms: simultaneous phase and envelope measurements by wavelet transformation

Patrick Sandoz; Maxime Jacquot

doi:10.1117/12.281147

17 September 1997 Processing of white-light correlograms: simultaneous phase and envelope measurements by wavelet transformation

Patrick Sandoz, Maxime Jacquot

Author Affiliations +

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281147
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

A common procedure of profilometry by means of white light interferometry is to scan one interferometer arm step by step. In this way, the intensity detected for each surface point reproduces the autocorrelogram of the light source, which is used for the determination of the absolute phase between a reference position and the zero optical path difference position. Phase changes due to reflection on the inspected surface produces a shift of the interference fringes with respect to the coherence envelope. If those phase changes vary from points to points, artifacts can be introduced in the profile reconstruction. We propose to measure simultaneously the interferometric phase and the shift of the interference fringes with respect to the coherence envelope. That processing is based on a wavelet transformation of the sampled light source correlograms and leads to complementary information that describes more completely the optical behavior of surfaces.

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Patrick Sandoz and Maxime Jacquot "Processing of white-light correlograms: simultaneous phase and envelope measurements by wavelet transformation", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281147

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