Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement

Angela Duparre; Stefan Gliech

doi:10.1117/12.281370

22 September 1997 Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement

Angela Duparre, Stefan Gliech

Proceedings Volume 3110, 10th Meeting on Optical Engineering in Israel; (1997) https://doi.org/10.1117/12.281370
Event: 10th Meeting on Optical Engineering in Israel, 1997, Jerusalem, Israel

Abstract

An instrument is described which enables the detection of backscattered light within a wide spectral region. The apparatus is based on a Coblentz sphere and is equipped with light sources from the UV to IR spectral region (248 nm to 10.6 micrometer). Results are reported of measurements on samples with different surface qualities such as supersmooth Si-wafers with sub-angstrom surface roughness, glass substrates, thin film optical components and machined surfaces. The set-up complies with a corresponding ISO project.

Citation Download Citation

Angela Duparre and Stefan Gliech "Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement", Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); https://doi.org/10.1117/12.281370

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