Quality Control And Ageing Tests On Replicated, Al/MgF2 Coated Aspheric Mirrors For The Far UV

Lars Mattsson; Stefan Johansson

doi:10.1117/12.938368

13 October 1986 Quality Control And Ageing Tests On Replicated, Al/MgF₂ Coated Aspheric Mirrors For The Far UV

Lars Mattsson, Stefan Johansson

Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938368
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Reflectance, angle-resolved scattering and total integrated scattering (TIS) measurements of surface roughness are reported for a number of Al/MgF₂ coated mirrors. Reflectances are given for the 160 - 250 nm wavelength region and scattering is measured at 160 nm and 633 nm. Both replicated aspherical mirrors and flat, unreplicated samples were investiga-ted. Replicated mirrors with an interdiffusion barrier layer retain their high reflectance properties in the far UV although heated to 100 0C for 2 hours. Absorption dominate intensity losses for most of the mirrors, but scattering observed for two of the samples severely degrade the far UV specular reflectance. Angle-resolved scattering measurements at different wavelengths are demonstrated to be a useful technique for tracing scattering mechanisms. Light scattering in the visible is shown not to be representative of the scattering observed in the far UV, as strong particulate scattering at 633 nm vanishes at 160 nm. The possibility of using angle-resolved scattering for roughness determination of curved surfaces is briefly discussed.

Citation Download Citation

Lars Mattsson and Stefan Johansson "Quality Control And Ageing Tests On Replicated, Al/MgF₂ Coated Aspheric Mirrors For The Far UV", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938368

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