Micromachined polysilicon torsion mirrors for an electrostatic optical switch in a free space

Hiroshi Toshiyoshi

doi:10.1117/12.305591

16 April 1998 Micromachined polysilicon torsion mirrors for an electrostatic optical switch in a free space

Hiroshi Toshiyoshi

Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305591
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India

Abstract

We have developed a new type of compact optical cross- connector by silicon micromachining technique. Torsion mirrors (300 micrometers X 600 micrometers ) supported by thin poly silicon beams (16 micrometers wide, 320 micrometers long, 0.4 micrometers thick) are arranged in a 2 X 2 matrix (3 mm X 5 mm) and independently operated by electrostatic force to reflect the incident light in a free-space. Using collimated-beam optical fibers for optical coupling, we obtained small insertion loss (-7.6 dB), a large attenuation ratio (>=60 dB), and small crosstalk (<EQ60 dB). The fabrication yield was higher than 80% thanks to the newly developed releasing technique using a silicon oxide diaphragm as an etch-stop layer and as a mechanical support in the process. Holding voltage (50 V) was reduced lower than the voltage to attract the mirror (100 approximately 150 V) using the large hysteresis of the angle-voltage characteristic of electrostatic operation.

Citation Download Citation

Hiroshi Toshiyoshi "Micromachined polysilicon torsion mirrors for an electrostatic optical switch in a free space", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305591

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