Digital microholointerferometry for microstructure studies

Lei Xu; Xiaoyuan Peng; Jianmin Miao; Anand Krishna Asundi

doi:10.1117/12.498417

7 March 2006 Digital microholointerferometry for microstructure studies

Lei Xu, Xiaoyuan Peng, Jianmin Miao, Anand Krishna Asundi

Proceedings Volume 4101, Laser Interferometry X: Techniques and Analysis; (2006) https://doi.org/10.1117/12.498417
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Digital micro-holo-interferometry is proposed in this paper for microstructure measurements. It is developed based on the in-line digital holography incorporated with long distance microscope. The system structure is theoretically explained with wavefront diffraction analysis. The compatibility of the long distance microscope with the specific requirements in micromeasurement is discussed. And the properties of the in-line configuration in improving system performance are studied. Theoretical analysis of the system is demonstrated by the experiments on a silicon microbeam for deformation determination.

Citation Download Citation

Lei Xu, Xiaoyuan Peng, Jianmin Miao, and Anand Krishna Asundi "Digital microholointerferometry for microstructure studies", Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); https://doi.org/10.1117/12.498417

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