Paper
13 September 2002 Dynamics of high-repetition-rate laser plasma extreme ultraviolet sources from droplet targets
Author Affiliations +
Abstract
As a mass limited target the water droplet laser plasma source has been shown to have many attractive features as a continuous, almost debris-free source for extreme ultraviolet (EUV) and X-ray applications. Through a dual experimental and theoretical study, we analyze the interaction physics between the laser light and the target. The hydrodynamic laser plasma simulation code, Medusa103 is used to model the electron density distribution for comparison to electron density distributions obtained through Abel inversion of plasma interferograms. In addition, flat field EUV spectra are compared to synthetic spectra calculated with the atomic physics code RATION.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian K. Keyser, Martin C. Richardson, and I. C. Edmond Turcu "Dynamics of high-repetition-rate laser plasma extreme ultraviolet sources from droplet targets", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482117
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Plasma

Extreme ultraviolet

Pulsed laser operation

Optical simulations

Mirrors

Ions

Oxygen

RELATED CONTENT


Back to Top