Pulsed laser deposited zinc oxide thin films for optical gas sensor applications

Eniko Gyoergy; Gabriel Socol; Ion N. Mihailescu; J. Santiso; C. Ducu; S. Ciuca

doi:10.1117/12.617237

22 April 2005 Pulsed laser deposited zinc oxide thin films for optical gas sensor applications

Eniko Gyoergy, Gabriel Socol, Ion N. Mihailescu, J. Santiso, C. Ducu, S. Ciuca

Proceedings Volume 5830, 13th International School on Quantum Electronics: Laser Physics and Applications; (2005) https://doi.org/10.1117/12.617237
Event: 13th International School on Quantum Electronics: Laser Physics and Applications, 2004, Bourgas, Bulgaria

Abstract

Zinc oxide thin films were grown by pulsed laser deposition technique. The ZnO targets were irradiated by an UV KrF* (λ=248 nm, τ_FWHM≈20 ns, v=2 Hz) excimer laser, at 2 J/cm² incident fluence value. We used (001) SiO₂ wafers as substrates, heated during the thin films grown process at temperature values within the range (150-500) °C. The experiments were performed in oxygen pressure at fixed values between 1 and 12 Pa. We investigated the effect of substrate temperature and oxygen presssure on the thin films morphology, crystalline status and optical properties. The thin films surface morphology was investigated by scanning electron microscopy and atomic force microscopy. The crystalline state and chemical composition of the films were investigated by X-ray diffractometry. The optical transmittance measurements were performed with a double beam spectrometer in the 300-1500 nm range. Our results show that the films deposited at oxygen pressure values higher than 10 Pa and substrate temperatures above 300 °C are c-axis oriented. Their average transmission in the visible-infrared spectral region is about 85%, and the corresponding refractive indexes and extinction coefficients are very close to those of the tabulated reference values.

Citation Download Citation

Eniko Gyoergy, Gabriel Socol, Ion N. Mihailescu, J. Santiso, C. Ducu, and S. Ciuca "Pulsed laser deposited zinc oxide thin films for optical gas sensor applications", Proc. SPIE 5830, 13th International School on Quantum Electronics: Laser Physics and Applications, (22 April 2005); https://doi.org/10.1117/12.617237

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