Influence of the fabrication process on the light emission of macroporous silicon

S. Cheylan; T. Trifonov; A. Rodriguez; L. F. Marsal; J. Pallares; R. Alcubilla; G. Badenes

doi:10.1117/12.608116

7 July 2005 Influence of the fabrication process on the light emission of macroporous silicon

S. Cheylan, T. Trifonov, A. Rodriguez, L. F. Marsal, J. Pallares, R. Alcubilla, G. Badenes

Proceedings Volume 5840, Photonic Materials, Devices, and Applications; (2005) https://doi.org/10.1117/12.608116
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

Macroporous silicon structures have been fabricated by electrochemical etching. Such fabrication process is known to result in the presence of a thin microporous Si layer at the walls of the macropores and at the surface. Photoluminescence measurements conducted in plan-view and cross-section exhibit a wide emission peak around 650nm which can be attributed to the microporous Si. The combination of a photonic crystal and a light emitter in one structure represents a potential for applications that has not been studied previously. This preliminary study shows the influence of the main fabrication parameters, namely the current density and the etchant solution, on the emission properties of the microporous Si layer.

Citation Download Citation

S. Cheylan, T. Trifonov, A. Rodriguez, L. F. Marsal, J. Pallares, R. Alcubilla, and G. Badenes "Influence of the fabrication process on the light emission of macroporous silicon", Proc. SPIE 5840, Photonic Materials, Devices, and Applications, (7 July 2005); https://doi.org/10.1117/12.608116

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