Liquid mirror as planarity standard: a simplified experimental approach

M. Vannoni; G. Molesini

doi:10.1117/12.612245

13 June 2005 Liquid mirror as planarity standard: a simplified experimental approach

M. Vannoni, G. Molesini

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612245
Event: Optical Metrology, 2005, Munich, Germany

Abstract

A simplified version of the liquid mirror setup to serve as planarity reference standard is described in detail. Particulars of the mounting, maintenance and use of the mirror are provided. A series of measurements over a diameter of 90 mm is reported; the resulting expanded uncertainty for the peak-to-valley achieved in experiments is 7 nm (2σ).

Citation Download Citation

M. Vannoni and G. Molesini "Liquid mirror as planarity standard: a simplified experimental approach", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612245

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