Error analysis of diffractive optical element manufactured by diamond turning technology

Yun-Cui Zhang; Long Liu; Nian-Yu Zou; Qing Liu

doi:10.1117/12.867950

6 October 2010 Error analysis of diffractive optical element manufactured by diamond turning technology

Yun-Cui Zhang, Long Liu, Nian-Yu Zou, Qing Liu

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 765525 (2010) https://doi.org/10.1117/12.867950
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Both cost and performance are important factors used to evaluate the manufacture methods for diffractive optical element (DOE). The diamond turning technology has many advantages of processing diffractive optical element compared with other methods. There are special errors existing in this process which can decrease the performance and limit the application field of the DOE. In this paper, the errors caused by diamond turning technology are analyzed and the calculation results are given.

Citation Download Citation

Yun-Cui Zhang, Long Liu, Nian-Yu Zou, and Qing Liu "Error analysis of diffractive optical element manufactured by diamond turning technology", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 765525 (6 October 2010); https://doi.org/10.1117/12.867950

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