Effects of mechanical inaccuracies on the measurement result in metrology systems

Florian Schneider; Markus Schinhaerl; Christian Vogt; Roland Maurer; Peter Sperber; Rolf Rascher; Richard Stamp; Gordon Smith

doi:10.1117/12.865697

11 October 2010 Effects of mechanical inaccuracies on the measurement result in metrology systems

Florian Schneider, Markus Schinhaerl, Christian Vogt, Roland Maurer, Peter Sperber, Rolf Rascher, Richard Stamp, Gordon Smith

Author Affiliations +

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 765611 (2010) https://doi.org/10.1117/12.865697
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Metrological systems commonly consist of a mechanical axial framework. However, any mechanical inaccuracies in such axial systems may cause falsifications in the measurement results. Therefore, precise knowledge of the effects of mechanical inaccuracies on measurement results is essential for measurement error compensation. This paper discusses the results of a testing series with a topographical coordinate measurement machine for the measurement of precision optical components in order to analyse and specify the different effects of mechanical inaccuracies on measurement results. The results obtained are not only beneficial for the design of new measurement machines and techniques. They may also be advantageously used for rapid measurement error compensation in metrological systems.

Citation Download Citation

Florian Schneider, Markus Schinhaerl, Christian Vogt, Roland Maurer, Peter Sperber, Rolf Rascher, Richard Stamp, and Gordon Smith "Effects of mechanical inaccuracies on the measurement result in metrology systems", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765611 (11 October 2010); https://doi.org/10.1117/12.865697

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KEYWORDS

Spherical lenses

Metrology

Interferometry

Sensors

Quartz

Low-intensity laser therapy

Optical components

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