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9 September 2011 Measurement technology based on laser internal/external cavity tuning
Shulian Zhang
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Proceedings Volume 8133, Dimensional Optical Metrology and Inspection for Practical Applications; 813302 (2011) https://doi.org/10.1117/12.895980
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States
Abstract
For an ordinary laser with two cavity mirrors, if the length of laser cavity changes half wavelength the laser frequency changes one longitudinal mode separation. For a laser with three cavity mirrors, in which a feedback mirror is used to feed part of the laser output beam back into the laser cavity, the external cavity length changes half wavelength the laser intensity fluctuates one period. This presentation gives some research results in measurement field based on changing (tuning) the length of laser internal/external cavity, including 1) HeNe laser cavity-tuning nanometer displacement measurement instruments (laser nanometer rulers), 2) HeNe laser feedback displacement measurement, 3) Nd:YAG laser feedback nanometer displacement measurement, 4) benchmark of waveplate phase retardation measurement based on laser frequency splitting, 5) in-site waveplate phase retardation measurement instruments based on laser feedback and polarization hopping, 6) quasi-common-path microchip Nd:YAG laser feedback interferometer, 7) non-contact Nd:YAG laser feedback surface profile measurement. Some of these instruments have been put into application and display some irreplaceable advantages.
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Shulian Zhang "Measurement technology based on laser internal/external cavity tuning", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 813302 (9 September 2011); https://doi.org/10.1117/12.895980
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KEYWORDS
Mirrors
Nd:YAG lasers
Laser applications
Phase measurement
Wave plates
Laser resonators
Interferometers
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