Digital Heterodyne Interferometry

N. A. Massie

doi:10.1117/12.941754

23 March 1987 Digital Heterodyne Interferometry

N. A. Massie

Proceedings Volume 0816, Interferometric Metrology; (1987) https://doi.org/10.1117/12.941754
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Measurements of optical phase differences have been obtained with resolutions of 1/500 wave rms at 100 kHz data rates using frequency shift interferometry. One implementation of this approach, called the digital heterodyne interferometer, uses Bragg cells to generate the frequency shift, and has been applied extensively to real-time, high precision measurements as well as in limited applications to optical testing. We discuss the fundamentals of this approach and review the applications.

Citation Download Citation

N. A. Massie "Digital Heterodyne Interferometry", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941754

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