Asphere metrology using variable optical null technology

Christopher Supranowitz; Chuck McFee; Paul Murphy

doi:10.1117/12.2009289

16 October 2012 Asphere metrology using variable optical null technology

Christopher Supranowitz, Chuck McFee, Paul Murphy

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 841604 (2012) https://doi.org/10.1117/12.2009289
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Aspheric surfaces can provide significant benefits to optical systems, but manufacturing high-precision aspheric surfaces is often limited by the availability of surface metrology. The lack of 3D surface data required to drive aspheric manufacturing equipment can create risk and unwanted variation in the manufacturing process. One typical approach to gathering this 3D data is using dedicated null correction optics in addition to the interferometer itself. However, the cost, lead time, inflexibility, and calibration difficulty of such null optics makes interferometric aspheric testing a far less attractive solution than the relatively simple spherical test. Subaperture stitching interferometry was originally developed to allow for the full-aperture 3D measurement of large-aperture spheres and flats using commercially available interferometers and transmission elements^{1, 2, 3} The method was then extended to the measurement of mild aspheric surfaces, by exploiting the local best-fitting and magnification of the high density fringe patterns associated with nonnull interferometry.⁴ Subaperture stitching interferometry was then extended by an order of magnitude through the use of a Variable Optical Null (VON) that allowed the measurement of high-departure aspheres. The automated VON has an optical system with a range of motion control that generates an optical wavefront that closely matches the surface of the asphere for each subaperture. The residual wavefront error is measured with a standard interferometer, and the fullaperture surface profile of the asphere is reconstructed using advanced stitching algorithms. This method allows for the accurate measurement of aspheres with more than 1000 waves of departure from best-fit sphere, without the use of dedicated null lenses.

Citation Download Citation

Christopher Supranowitz, Chuck McFee, and Paul Murphy "Asphere metrology using variable optical null technology", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 841604 (16 October 2012); https://doi.org/10.1117/12.2009289

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available