Two-flat absolute test solutions based on pixel rotation averaging

Wenqing Sun; Lei Chen; Yong He; Hongzhu Ri

doi:10.1117/12.975138

15 October 2012 Two-flat absolute test solutions based on pixel rotation averaging

Wenqing Sun, Lei Chen, Yong He, Hongzhu Ri

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84172B (2012) https://doi.org/10.1117/12.975138
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Absolute testing is an important means of measuring the surface deviation with high precision. A novel method is proposed to approach solutions of the absolute surface 3-D distributions that based on the two-flat method. Measurement data are separated into even and odd part and the rotation averaging method is used to calculate the rotation variant part. The performance of this new method is evaluated by compared with the method in the literature. The maximum difference of peak to valley (PV) and root mean square (RMS) between the two methods are 2.3nm and 0.4nm, respectively. The advantage of this method is that it can obtain the surface information of the low and mid-spatial frequency. The repeatability error propagation of the proposed method is discussed.

Citation Download Citation

Wenqing Sun, Lei Chen, Yong He, and Hongzhu Ri "Two-flat absolute test solutions based on pixel rotation averaging", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84172B (15 October 2012); https://doi.org/10.1117/12.975138

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