Diffraction effects for interferometric measurements due to imaging aberrations

Ping Zhou; Chunyu Zhao; James Burge

doi:10.1117/12.930104

13 September 2012 Diffraction effects for interferometric measurements due to imaging aberrations

Ping Zhou, Chunyu Zhao, James Burge

Proceedings Volume 8493, Interferometry XVI: Techniques and Analysis; 84930D (2012) https://doi.org/10.1117/12.930104
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Aspheric surfaces are often measured using interferometers with null correctors. The null corrector creates a wavefront that matches the surface under test, but also introduces imaging aberrations, such as mapping distortion and field curvature. These imaging aberrations cause high frequency features in the surface under test to be filtered out and create artifacts at edges. We provide a concise methodology for analyzing these effects using field curvatures, and showing how they couple with diffraction as represented by the Talbot effect and Fresnel edge diffraction.

Citation Download Citation

Ping Zhou, Chunyu Zhao, and James Burge "Diffraction effects for interferometric measurements due to imaging aberrations", Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 84930D (13 September 2012); https://doi.org/10.1117/12.930104

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