Research on silicon rotor turned gyroscope

Huiliang Cao; Hongsheng Li; Bo Yang; Shourong Wang; Kunyu Li

doi:10.1117/12.2010534

14 March 2013 Research on silicon rotor turned gyroscope

Huiliang Cao, Hongsheng Li, Bo Yang, Shourong Wang, Kunyu Li

Proceedings Volume 8768, International Conference on Graphic and Image Processing (ICGIP 2012); 876881 (2013) https://doi.org/10.1117/12.2010534
Event: 2012 International Conference on Graphic and Image Processing, 2012, Singapore, Singapore

Abstract

This paper introduces a novel thin silicon rotor turned gyroscope (SRTG). With a micro motor driving the rotor and two pairs of torsion bars and a gimbal ring realizing dynamical tuning, this gyroscope inherits the structure and working principle of the dynamically tuned gyroscope (DTG). The torsion bars, gimbal ring, rotor, annunciator and torquer are processed by micro-mechanical technology. The declination of rotor is sensed by differential capacitances. The rotor is rebalanced by electrostatic forces. In this paper, the details about the structure and working principle of SRTG is presented, the block diagram of the circuit in SRTG is discussed. Experiments are done on one sensitive direction of SRTG, and the curve is given, proved the feasibility.

Citation Download Citation

Huiliang Cao, Hongsheng Li, Bo Yang, Shourong Wang, and Kunyu Li "Research on silicon rotor turned gyroscope", Proc. SPIE 8768, International Conference on Graphic and Image Processing (ICGIP 2012), 876881 (14 March 2013); https://doi.org/10.1117/12.2010534

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