High Precision Measurement Of Glass Sample Properties By Transmission Ellipsometry

U. Riss; W Holzapfel

doi:10.1117/12.948177

16 January 1989 High Precision Measurement Of Glass Sample Properties By Transmission Ellipsometry

U. Riss, W Holzapfel

Proceedings Volume 0970, Properties and Characteristics of Optical Glass; (1989) https://doi.org/10.1117/12.948177
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

The optical anisotropy properties of glass samples can be well determined by four measurands: relative retardation A, orientation of the optical fast axis 9, polarization-dependent loss angle 4', and pseudoactivity angle p. Using our transmission ellipsometric method, it is possible to ascertain these four characteristic quantities with high resolution and their dependence on the beam position in the sample. In relation to polarization microscopes which are often applied in quality control to analyze anisotropies, this new ellipsometric method is slower but more sensitive by a factor of 1000. Especially glass samples or optical components with plane parallel surfaces are suitable for high accuracy measurements applying the transmission ellipsometric method. For perpendicular incidence of the laser beam of the ellipsometer, the material-dependent anisotropies in the coated or uncoated sample dominate and can be precisely determined if the disturbing Fabry-Perot-resonance response of the sample is known or avoided. The influence of the sample surfaces on the measured anisotropy can be estimated by an equivalent optical circuit diagram. The performance of the transmission ellipsometric method developed by us is demonstrated by measurements of different glass samples.

Citation Download Citation

U. Riss and W Holzapfel "High Precision Measurement Of Glass Sample Properties By Transmission Ellipsometry", Proc. SPIE 0970, Properties and Characteristics of Optical Glass, (16 January 1989); https://doi.org/10.1117/12.948177

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