Two-dimensional diagonal-based heterodyne grating interferometer with enhanced signal-to-noise ratio and optical subdivision

Cunbao Lin; Shuhua Yan; Dan Ding; Guochao Wang

doi:10.1117/1.OE.57.6.064102

6 June 2018 Two-dimensional diagonal-based heterodyne grating interferometer with enhanced signal-to-noise ratio and optical subdivision

Cunbao Lin, Shuhua Yan, Dan Ding, Guochao Wang

Author Affiliations +

Optical Engineering, Vol. 57, Issue 6, 064102 (June 2018). https://doi.org/10.1117/1.OE.57.6.064102

Abstract

A diagonal-based heterodyne grating interferometer (HGI) for two-dimensional displacement measurement is presented. It can simultaneously realize the high signal contrast and signal-to-noise ratio (SNR) with the specially designed cross grating. Meanwhile, an eightfold optical subdivision can be acquired with the proposed phase decoupling method. The signal contrast of 96.55% and SNR of 50 dB are obtained with laser power of 0.45 mW. Several tests including linear displacement, planar displacement, and stability are conducted in the experiments. The theoretical resolution of 0.125 nm, the short-range repeatability of 2.35 and 3.24 nm under round-trip movement of 10 μm, and the system stability better than ± 4 and ± 6 nm over 10 min are achieved for the X- and Y-directions, respectively. In addition, the measurement errors including geometric, nonlinear, and noncommon-path errors are analyzed. The results demonstrate that the proposed diagonal-based configuration combined with cross gratings is extremely suitable for HGIs, which has the potential to simultaneously improve the performance and practicability of HGIs.

Citation Download Citation

Cunbao Lin, Shuhua Yan, Dan Ding, and Guochao Wang "Two-dimensional diagonal-based heterodyne grating interferometer with enhanced signal-to-noise ratio and optical subdivision," Optical Engineering 57(6), 064102 (6 June 2018). https://doi.org/10.1117/1.OE.57.6.064102

Received: 24 January 2018; Accepted: 17 May 2018; Published: 6 June 2018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available