Qihang Zhai
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 19 December 2022 Presentation + Paper
Fuyuan Deng, Tianshi Lu, Qihang Zhai, Linbin Luo, Gaopeng Xue, Qian Zhou, Xiaohao Wang, Xinghui Li
Proceedings Volume 12318, 123182F (2022) https://doi.org/10.1117/12.2643872
KEYWORDS: Photomasks, Photoresist materials, Mirrors, Lithography, Polarization, Interferometers, Electron beam lithography, Laser applications, Optical lithography, Fabrication

Proceedings Article | 8 July 2022 Paper
Gaopeng Xue, Liyu Lin, Qihang Zhai, Qian Zhou, Xiaohao Wang, Xinghui Li
Proceedings Volume 12283, 1228309 (2022) https://doi.org/10.1117/12.2616432
KEYWORDS: Dielectric polarization, Mirrors, Modulation, Dielectrics, Reflection, Aluminum, Optical lithography, 3D modeling, Interferometers, Reflectivity

Proceedings Article | 9 October 2021 Presentation + Paper
Proceedings Volume 11898, 1189819 (2021) https://doi.org/10.1117/12.2602229
KEYWORDS: Optical encoders, Diffraction gratings, Mirrors, Manufacturing, Lithography, Interferometers, Wafer-level optics, Reflectivity, Projection lithography

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