Prof. Shichang Zou Profile

Prof. Shichang Zou

at Shanghai Institute of Microsystem and Information

SPIE Involvement:

Author

Publications (8)

SPIE Journal Paper | 5 May 2014

InGaAs PIN photodetectors integrated and vertically coupled with silicon-on-insulator waveguides

Zhiqi Wang, Chao Qiu, Zhen Sheng, Aimin Wu, Xi Wang, Shichang Zou, Fuwan Gan

OE, Vol. 53, Issue 05, 057101, (May 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.5.057101

KEYWORDS: Photodetectors, Silicon, Indium gallium arsenide, Waveguides, Absorption, Optical instrument design, Interfaces, Germanium, Optical engineering, Silicon photonics

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SPIE Journal Paper | 3 June 2013 Open Access

Broadband compact reflector based on all-dielectric subwavelength nanoparticle chains: reflecting lights beyond normal incidence with a very high reflectivity

Hao Li, Wei Li, Aimin Wu, Chao Qiu, Zhen Sheng, Xi Wang, Shichang Zou, Fuwan Gan

OE, Vol. 52, Issue 06, 068001, (June 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.6.068001

KEYWORDS: Reflectivity, Nanoparticles, Reflectors, Particles, Gallium nitride, Tolerancing, Diffraction, Silver, Reflection, Optical components

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Proceedings Article | 28 November 2011 Paper

Novel silicon-on-insulator grating couplers based on CMOS poly-silicon gate layer

Chao Qiu, Zhen Sheng, Le Li, Albert Pang, Aimin Wu, Junjie Du, Jing Chen, Xi Wang, Fuwan Gan, Shichang Zou

Proceedings Volume 8308, 83081G (2011) https://doi.org/10.1117/12.904183

KEYWORDS: Silicon, Waveguides, Field effect transistors, Optical fibers, Etching, Photomasks, Integrated circuit design, Integrated circuits, Semiconducting wafers, Interfaces

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SPIE Journal Paper | 1 March 2009 Open Access

Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator

Zhifeng Yang, Na Fang, Aimin Wu, Jing Chen, Miao Zhang, Xi Wang, Shichang Zou

OE, Vol. 48, Issue 03, 030503, (March 2009) https://doi.org/10.1117/12.10.1117/1.3095916

KEYWORDS: Waveguides, Silicon, Semiconducting wafers, Anisotropic etching, Etching, Dry etching, Scanning electron microscopy, Photomasks, Single mode fibers, Optical lithography

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Proceedings Article | 25 September 1996 Paper

Coupling efficiency of metal gratings in a normal incident GaAs/AlGaAs quantum well infrared detector

Yu Yang, Guanqun Xia, Shichang Zou, Xun Wang

Proceedings Volume 2894, (1996) https://doi.org/10.1117/12.252121

KEYWORDS: Quantum wells, Metals, Infrared detectors, Quantum efficiency, Refractive index, Absorption, Semiconductors

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Proceedings Article | 26 October 1994 Paper

Quantum well states of a spacer in a magnetic metal sandwich system and exchange coupling

Zhongcheng Wang, Shichang Zou, Shaofeng Wang

Proceedings Volume 2364, (1994) https://doi.org/10.1117/12.190789

KEYWORDS: Magnetism, Quantum wells, Metals, Chemical species, Fermium, Frequency modulation, Scattering, Statistical modeling, Atomic force microscopy, Ferromagnetics

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Proceedings Article | 26 October 1994 Paper

Anomalous damage behavior of BF2+ implantation in silicon

Chenglu Lin, Zu Zhou, Xiao Li, Shichang Zou, Peter Hemment

Proceedings Volume 2364, (1994) https://doi.org/10.1117/12.190740

KEYWORDS: Silicon, Ions, Transmission electron microscopy, Scattering, Photomicroscopy, Backscatter, Transparency, Ion beams, Microelectronics, Laser scattering

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Proceedings Article | 26 October 1994 Paper

Ion beam synthesis of thin films

Shichang Zou

Proceedings Volume 2364, (1994) https://doi.org/10.1117/12.190725

KEYWORDS: Ion beams, Ions, Silicon, Thin films, Tin, Chemical species, Computer simulations, Ion implantation, Crystals, Sputter deposition

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