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Xiaozhen Wang
at University of Ottawa
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Author
Publications (4)
Proceedings Article | 8 March 2016 Paper
Electromagnetic field modeling for defect detection in 7 nm node patterned wafers
Proceedings Volume 9778, 97780P (2016) https://doi.org/10.1117/12.2218979
KEYWORDS: Silicon, Electromagnetism, Semiconducting wafers, Defect inspection, Defect detection, Wafer-level optics, Inspection, Computer simulations, Scattering, Bridges, Signal detection, Polarization, Imaging systems, Near field optics
Proceedings Article | 17 October 2012 Paper
High-sensitivity force measurement using optical tapered fiber with optical frequency-domain reflectometry
Proceedings Volume 8421, 84211F (2012) https://doi.org/10.1117/12.975074
KEYWORDS: Single mode fibers, Spatial resolution, Refractive index, Reflectometry, Sensors, Optical testing, Fiber optics sensors, Signal detection, Cladding, Data acquisition
Proceedings Article | 17 May 2011 Paper
Tunable Fabry-Perot filter based on hollow-core photonic bandgap fiber and micro-fiber and its application
Proceedings Volume 7753, 77530E (2011) https://doi.org/10.1117/12.886519
KEYWORDS: Optical filters, Single mode fibers, Tunable filters, Fabry–Perot interferometers, Mirrors, Reflection, Fiber lasers, Reflectivity, Multiplexing, Optical amplifiers
Proceedings Article | 5 October 2009 Paper
Acoustic emission sensor based on biconical fiber micro-tapers
Proceedings Volume 7503, 75032V (2009) https://doi.org/10.1117/12.834882
KEYWORDS: Signal to noise ratio, Single mode fibers, Sensors, Acoustic emission, Acoustics, Interferometers, Refractive index, Fiber optics sensors, Fiber couplers, Metals
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