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Yuguang Chen
at Huazhong Univ of Science and Technoology
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Publications (1)
Proceedings Article | 1 November 2021 Paper
A scanner matching method based on covariance matrix adaptation evolution strategy
Proceedings Volume 12057, 120572F (2021) https://doi.org/10.1117/12.2605879
KEYWORDS: Scanners, Particle swarm optimization, Lithography, Lithographic illumination, Particles, Computer simulations, Optimization (mathematics), Genetic algorithms, Resolution enhancement technologies, Photomasks
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