Optical and x-ray characterization applied to multilayer reverse engineering

Thierry Boudet; M. Berger; Oliver Lartigue; B. Hirrien

doi:10.1117/1.601700

1 July 1998 Optical and x-ray characterization applied to multilayer reverse engineering

Thierry Boudet, M. Berger, Oliver Lartigue, B. Hirrien

Optical Engineering, Vol. 37, Issue 7, (July 1998). https://doi.org/10.1117/1.601700

The complexity of optical thin film stacks leads to new techniques being developed for characterization of components after deposition. We show the complementarity between optical characterization techniques and grazing x-ray reflectivity. We illustrate the efficiency of that complementarity for the reverse engineering of a 7-layer mirror and a 50-layer bandpass filter.

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Thierry Boudet, M. Berger, Oliver Lartigue, and B. Hirrien "Optical and x-ray characterization applied to multilayer reverse engineering," Optical Engineering 37(7), (1 July 1998). https://doi.org/10.1117/1.601700

Published: 1 July 1998

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