ArF* And Ar[sub]2[/sub]F* Excimer Systems

Peter J. Peters; Bert M. Bastiaens; Umberto del Bello; Wim J. Witteman

doi:10.1117/12.950128

26 April 1989 ArF* And Ar₂F* Excimer Systems

Peter J. Peters, Bert M. Bastiaens, Umberto del Bello, Wim J. Witteman

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950128
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The effect of the addition of Ne as a buffer gas to an Ar/F2 laser gas mixture was studied in two different systems. With the largest device the total output energy was optimized, in the smaller system the pressure dependency of the addition of the Ne was studied. Futhermore the fluorescence signals of ArF* and Ar2F* were recorded as a function of the excitation length and pumping intensity.

Citation Download Citation

Peter J. Peters, Bert M. Bastiaens, Umberto del Bello, and Wim J. Witteman "ArF* And Ar₂F* Excimer Systems", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950128

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