A CVD SiC deformable mirror with monolithic waterline for adaptive optics

Kyohoon Ahn; Hagyong Kihm

doi:10.1117/12.2306766

11 July 2018 A CVD SiC deformable mirror with monolithic waterline for adaptive optics

Kyohoon Ahn, Hagyong Kihm

Proceedings Volume 10703, Adaptive Optics Systems VI; 1070377 (2018) https://doi.org/10.1117/12.2306766
Event: SPIE Astronomical Telescopes + Instrumentation, 2018, Austin, Texas, United States

Abstract

We propose a novel deformable mirror (DM) for adaptive optics in high power laser applications. The DM is made of a SiC (Silicon carbide) faceplate, and cooling channels are embedded monolithically inside the faceplate by CVD (Chemical vapor deposition) method. The faceplate is 200 mm in diameter and 3 mm in thickness, and it is actuated by 137 stack-type piezoelectric transducers arranged in a square grid. The cooling capability and optical performance of the DM are verified by simulations and actual experiments with a heat source. The DM is proved to operate at 1 kHz without the coolant flow and 100 Hz with the coolant flow, and the residual errors after compensation is less than 30 nm rms (root-mean-square). This paper presents the design, fabrication, and optical performance of the CVD SiC DM.

Citation Download Citation

Kyohoon Ahn and Hagyong Kihm "A CVD SiC deformable mirror with monolithic waterline for adaptive optics", Proc. SPIE 10703, Adaptive Optics Systems VI, 1070377 (11 July 2018); https://doi.org/10.1117/12.2306766

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