All-new nickel-based Metal Core Organic Cluster (MCOC) resist for N7+ node patterning

Satinder K. Sharma; Rudra Kumar; Manvendra Chauhan; Mohamad G. Moinuddin; Jerome Peter; Subrata Ghosh; Chullikkattil P. Pradeep; Kenneth E. Gonsalves

doi:10.1117/12.2552189

26 March 2020 All-new nickel-based Metal Core Organic Cluster (MCOC) resist for N7+ node patterning

Satinder K. Sharma, Rudra Kumar, Manvendra Chauhan, Mohamad G. Moinuddin, Jerome Peter, Subrata Ghosh, Chullikkattil P. Pradeep, Kenneth E. Gonsalves

Author Affiliations +

Proceedings Volume 11326, Advances in Patterning Materials and Processes XXXVII; 1132604 (2020) https://doi.org/10.1117/12.2552189
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

The increase in the demand of sub-10 nm feature size in semiconductor industries necessitates a new kind of resist material development which can absorb a large fraction of irradiation and retains the small size cluster distribution (1-2 nm). In this context, we developed a novel nickel-based organo-metallic cluster comprising high optical density inorganic nickel as metal building units (MBU), and 3,3-Dimethylacrylic acid as an organic ligand to form Ni-DMA clusters. The synthesised clusters have ~1 nm size with narrow size distribution. The formulated resist shows the negative tone pattern when exposed with a focused helium ion (He⁺) beam and e-beam. The high-resolution line patterns of ~8 nm at the dose of ~40 μC cm^-2 were obtained with the minimum line edge roughness (LER) and line width roughness (LWR) of 2.16 ± 0.04 nm and 3.03 ± 0.06 nm, respectively.

Conference Presentation

Citation Download Citation

Satinder K. Sharma, Rudra Kumar, Manvendra Chauhan, Mohamad G. Moinuddin, Jerome Peter, Subrata Ghosh, Chullikkattil P. Pradeep, and Kenneth E. Gonsalves "All-new nickel-based Metal Core Organic Cluster (MCOC) resist for N7+ node patterning", Proc. SPIE 11326, Advances in Patterning Materials and Processes XXXVII, 1132604 (26 March 2020); https://doi.org/10.1117/12.2552189

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