Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere

Kirill Bronnikov; Alexander Dostovalov; Konstantin Okotrub; Aleksandr Kuchmizhak; Victor Korolkov; Sergey Babin

doi:10.1117/12.2601459

9 October 2021 Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere

Kirill Bronnikov, Alexander Dostovalov, Konstantin Okotrub, Aleksandr Kuchmizhak, Victor Korolkov, Sergey Babin

Author Affiliations +

Proceedings Volume 11892, Advanced Laser Processing and Manufacturing V; 118920W (2021) https://doi.org/10.1117/12.2601459
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Abstract

Recently, highly regular thermochemical laser-induced periodic surface structures (TLIPSS) have become the subject of active studies. TLIPSS are formed in the interference maxima due to the local oxidation of the material irradiated with ultrashort laser pulses and are characterized by the elevation of the relief that forms parallel oxide protrusions. The gas surrounding is expected to affect the morphology and chemical composition of the resulting TLIPSS; however, such effects were rarely studied so far. Here we present the results of the TLIPSS fabrication on glass-supported Si-Ti bilayer films using an astigmatic Gaussian IR femtosecond beam both in air and a nitrogen-rich atmosphere. The formation of ordered TLIPSS with the period of ≈ 920 nm is observed at slow scanning speeds (∼1 μm/s) and low fluences in a nitrogen-rich atmosphere. Raman spectroscopy revealed the presence of TiO₂ (rutile) peaks, as well as bands centered at 280 cm^-1 and 320 cm^-1, which can be related to TiN in amorphous and polycrystalline phase.

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Kirill Bronnikov, Alexander Dostovalov, Konstantin Okotrub, Aleksandr Kuchmizhak, Victor Korolkov, and Sergey Babin "Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere", Proc. SPIE 11892, Advanced Laser Processing and Manufacturing V, 118920W (9 October 2021); https://doi.org/10.1117/12.2601459

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