3D resist master evaluation protocol for nanoimprint lithography

Diana Fernandez Rodas; Jérôme Rêche; Raluca Tiron

doi:10.1117/12.2676111

3 October 2023 3D resist master evaluation protocol for nanoimprint lithography

Diana Fernandez Rodas, Jérôme Rêche, Raluca Tiron

Proceedings Volume 12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX; 126530F (2023) https://doi.org/10.1117/12.2676111
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

Nanoimprint Lithography (NIL) is a lithography technique suitable for mass production because it can replicate complex patterns down to the nanometer scale with reduced time and cost. The master is one of the key elements of NIL. It determines the resolution of the replicated patterns and plays a role in defectivity. Therefore, it must be characterized to control the replication as properly as possible. Here, we target to create a resist master to achieve 3D structures. This master is made by grayscale electron beam lithography to obtain submicron resolution. In this study, full characterization of structures are presented to validate resist master quality.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Diana Fernandez Rodas, Jérôme Rêche, and Raluca Tiron "3D resist master evaluation protocol for nanoimprint lithography", Proc. SPIE 12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX, 126530F (3 October 2023); https://doi.org/10.1117/12.2676111

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available