Study on energy consumption optimization of polysilicon reduction furnace

Rui Hu; Jin Wang

doi:10.1117/12.3030756

5 June 2024 Study on energy consumption optimization of polysilicon reduction furnace

Rui Hu, Jin Wang

Proceedings Volume 13163, Fourth International Conference on Mechanical, Electronics, and Electrical and Automation Control (METMS 2024); 1316332 (2024) https://doi.org/10.1117/12.3030756
Event: International Conference on Mechanical, Electronics, and Electrical and Automation Control (METMS 2024), 2024, Xi'an, China

Abstract

With the guidance and support of the policy, the market demand for solar photovoltaic panels will continue to expand. To reduce the energy consumption of polysilicon reduction furnace and improve the quality, a numerical model of a 24-pair silicon rod polycrystalline silicon reduction furnace is constructed in the present study, and the coupling calculation of convection and radiation is carried out by using the SST K-ω model and the DO radiation model. The flow field and temperature field in the reduction furnace affected by various process parameters are discussed to explore the mechanism of action. The results show that the deposition rate of polysilicon increases with the increase of feed gas inlet velocity, the increase of operating pressure and the decrease of H² ratio.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Rui Hu and Jin Wang "Study on energy consumption optimization of polysilicon reduction furnace", Proc. SPIE 13163, Fourth International Conference on Mechanical, Electronics, and Electrical and Automation Control (METMS 2024), 1316332 (5 June 2024); https://doi.org/10.1117/12.3030756

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