Laser-assisted deposition of thin films onto transparent substrates from liquid-phase organometallic precursor: iron acetylacetonate

George A. Shafeev; Lucien Diego Laude

doi:10.1117/12.46964

1 September 1991 Laser-assisted deposition of thin films onto transparent substrates from liquid-phase organometallic precursor: iron acetylacetonate

George A. Shafeev, Lucien Diego Laude

Author Affiliations +

Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46964
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

Deposition of thin (200 $ANS) metal films onto various substrates (glass, fused quartz, sapphire) is reported. The process is initiated with a cw Ar+ laser beam ((lambda) equals 514 nm) irradiating a solution of FeAcetyleAcetonate (FeAcAc) through a transparent substrate. Two types of deposit morphology are observed: either thin films or thick porous structures. The transition from one type to the other has the character of instability, being characterized by a threshold laser power.

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George A. Shafeev and Lucien Diego Laude "Laser-assisted deposition of thin films onto transparent substrates from liquid-phase organometallic precursor: iron acetylacetonate", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); https://doi.org/10.1117/12.46964

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