New mixed sputtering-plasma CVD technique for the deposition of diamondlike films

Francesca Demichelis; G. Giachello; C. F. Pirri; Alberto Tagliaferro

doi:10.1117/12.48286

1 December 1991 New mixed sputtering-plasma CVD technique for the deposition of diamondlike films

Francesca Demichelis, G. Giachello, C. F. Pirri, Alberto Tagliaferro

Proceedings Volume 1534, Diamond Optics IV; (1991) https://doi.org/10.1117/12.48286
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The purpose of this work is to show that diamond-like carbon (DLC) films of good quality can be deposited by sputtering of a graphite target in an argon-hydrogen atmosphere. The details of the RF diode sputtering system are described. The main features of the deposition process, such as the detection of CH radicals in the plasma, are presented. The advantages of this system are discussed. For example, it joins the easy-to-scale characteristics of the glow discharge process with the independent control of carbon and hydrogen sources found in dual ion beam sputtering. The DLC character of the films are checked measuring the Knupp hardness and the optical energy gap.

Citation Download Citation

Francesca Demichelis, G. Giachello, C. F. Pirri, and Alberto Tagliaferro "New mixed sputtering-plasma CVD technique for the deposition of diamondlike films", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); https://doi.org/10.1117/12.48286

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available