Industrial applications on reflective or translucent samples of a novel automated Meuller-matrix scatterometer

Francoise Delplancke

doi:10.1117/12.278983

3 October 1997 Industrial applications on reflective or translucent samples of a novel automated Meuller-matrix scatterometer

Francoise Delplancke

Author Affiliations +

Proceedings Volume 3121, Polarization: Measurement, Analysis, and Remote Sensing; (1997) https://doi.org/10.1117/12.278983
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The characteristics and performances of a new Mueller-matrix scatterometer will be described. Applications and results on industrial samples will be presented. The device measures the angular distribution of the 16 Mueller-matrix elements, characterizing completely the light polarization modifications induced by any sample, transparent or scattering, in reflexion or in transmission. The measurement is made in less than 1 s., with an accuracy higher than 95 %, for any angle of incidence and any scattering angle in the range ofO° (forward scattering) to 175° (near backscattering). The instrument is using electro-optical polarization modulation techniques for polarization generation, a 4-detector photopolarimeter for polarization detection, and Fast Fourier Transform (FF1') for the analyzis of the 4 signals. The interest of Mueller-matrix analyzis is that, compared to simple scatterometric measurements, this method can give information about the non-ideality of the analyzed samples : shape of the particles in suspensions, multiple reflexions, presence of contaminants, roughness shape of surfaces, porosity, presence of thin surface films. This information is very valuable for complex industrial samples. The applicxations include testing of transparent, non-scattering elements (liquid crystal devices), characterization of scattering translucent samples (suspensions in chemical industries), and inspection of rough surfaces covered or not by thin films (e.g. steel or aluminum sheets on production lines, electrochemical deposits). A future developement of the methjod for imaging Mueller-matrix polanmetry-scatterometry will also be described.

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Francoise Delplancke "Industrial applications on reflective or translucent samples of a novel automated Meuller-matrix scatterometer", Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); https://doi.org/10.1117/12.278983

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KEYWORDS

Polarization

Scattering

Light scattering

Signal detection

Reflectivity

Aluminum

Modulation

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