High-performance chemically amplified positive electron-beam resist

Takahisa Namiki; Jun-Ichi Kon; Ei Yano

doi:10.1117/12.350187

11 June 1999 High-performance chemically amplified positive electron-beam resist

Takahisa Namiki, Jun-Ichi Kon, Ei Yano

Proceedings Volume 3678, Advances in Resist Technology and Processing XVI; (1999) https://doi.org/10.1117/12.350187
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

The effect of an alkali decomposable additive on a chemically amplified (CA) positive electron-beam (EB) resists was studied. HalogenoMethylEster (HME), 1,4- bis(bromoacetoxy) benzene was synthesize and used as an alkali decomposable additive. The hydrophobic HME decomposed with an alkali solution and changed into a hydrophilic, which in turn increased the alkali dissolution rate of the exposed region of the resist and enhanced the resist contrast. In addition, the bromomethyl groups and ester groups are hydrolyzed with a high degree of polarity change. HME having the large dissolution acceleration effect at an exposed region is suitable for application as a positive resist. HME was added to 2-component CA positive EB resist consisting of a base polymer and a photoacid generator. As a result of a high degree of polarity change, HME enhanced the resist contrast with no loss in sensitivity. The delineation of a fine 0.13 micrometers hole-pattern was possible with the addition of HME. The addition of HME rendered the sidewalls smooth and vertical.

Citation Download Citation

Takahisa Namiki, Jun-Ichi Kon, and Ei Yano "High-performance chemically amplified positive electron-beam resist", Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); https://doi.org/10.1117/12.350187

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available