Critical evaluation of photomask needs for competing 65-nm node RET options

Christopher J. Progler; Guangming Xiao

doi:10.1117/12.485439

26 June 2003 Critical evaluation of photomask needs for competing 65-nm node RET options

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.485439
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

A comprehensive set of numerical, mask pattern operators is developed and applied for the purpose of understanding photomask fabrication tolerances supporting aggressive, optical lithography resolution enhancement. Using these numerical operators, the content and fidelity of the photomask is systematically degraded and wafer level results predicted using experimentally calibrated simulation. The concept of a mask sensitivity matrix is introduced and used as a bridge to full Monte Carlo analysis of photomask fabrication errors. A statistical approach to analyze mask defect tolerances for resolution enhancement options is presented within the same numerical framework. Such methodical and detailed analysis of mask construction parameters is a vital step toward understanding the complex interaction between mask quality and printed image and hence the delivery of 65 nm node lithography capability.

Citation Download Citation

Christopher J. Progler and Guangming Xiao "Critical evaluation of photomask needs for competing 65-nm node RET options", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.485439

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available