The Nanostructured Origami 3D fabrication and assembly process

George Barbastathis; Hyun Jin In; Will Arora; Tilman Buchner; Kehan Tian; Henry I. Smith

doi:10.1117/12.562581

18 October 2004 The Nanostructured Origami 3D fabrication and assembly process

George Barbastathis, Hyun Jin In, Will Arora, Tilman Buchner, Kehan Tian, Henry I. Smith

Proceedings Volume 5554, Photonics for Space Environments IX; (2004) https://doi.org/10.1117/12.562581
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Nanostructured OrigamiTM 3D Fabrication and Assembly Process is a method of manufacturing 3D nanosystems using exclusively 2D litho tools. The 3D structure is obtained by folding a nanopatterned 2D substrate. We report on the materials, actuation, and modeling aspects of the manufacturing process, and present experimental results from fabricated structures.

Citation Download Citation

George Barbastathis, Hyun Jin In, Will Arora, Tilman Buchner, Kehan Tian, and Henry I. Smith "The Nanostructured Origami 3D fabrication and assembly process", Proc. SPIE 5554, Photonics for Space Environments IX, (18 October 2004); https://doi.org/10.1117/12.562581

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