Fabrication of micropyramid structure by fly-cutting

Yuetian Huang; Shijie Li; Bin Fan; Yongjian Wan; Shibin Wu; Jin Zhang; Haifeng Liang; Shaobo Ge

doi:10.1117/1.OE.58.1.013107

30 January 2019 Fabrication of micropyramid structure by fly-cutting

Yuetian Huang, Shijie Li, Bin Fan, Yongjian Wan, Shibin Wu, Jin Zhang, Haifeng Liang, Shaobo Ge

Author Affiliations +

Funded by: Xi’an Science and Technology Bureau, National Key Laboratory of Science and Technology on Communications, Ministry of National Defense, People’s Republic of China, Shaanxi Provincial Science and Technology Department, Xi’an Key Laboratory of Intelligent Detection and Perception

Optical Engineering, Vol. 58, Issue 1, 013107 (January 2019). https://doi.org/10.1117/1.OE.58.1.013107

Abstract

Microgroove cutting by fly-cutting is studied to obtain the optimized parameters to get a smooth groove with less burr and chip. We analyzed the reason for the second groove and reduced the cutting times to fade the effect of machine reposition error. Introducing additional empty cut further reduced the burr and chip. To get the ideal micropyramid arrays, all factors must be considered and controlled. Finally, processed pyramid arrays with the depth of 1 μm whose structure distributed the entire surface evenly and with no obvious chip.

Citation Download Citation

Yuetian Huang, Shijie Li, Bin Fan, Yongjian Wan, Shibin Wu, Jin Zhang, Haifeng Liang, and Shaobo Ge "Fabrication of micropyramid structure by fly-cutting," Optical Engineering 58(1), 013107 (30 January 2019). https://doi.org/10.1117/1.OE.58.1.013107

Received: 4 November 2018; Accepted: 18 December 2018; Published: 30 January 2019

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